Tender Details

Country: Canada
Summary: Plasma Enhanced Chemical Vapour Deposition (Pecvd) System and An…
CAT Ref No: 108693829
Deadline: 08 Nov 2024
Financier: Self Financed
Purchaser Ownership: Government
Tender Value: Refer Document
Notice Type: Tender
Document Ref. No.: BC205332
Purchaser's Detail:
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Description:
** Note: The RFP is available for download on Merx.com ***
** Note: The RFP must be submitted in Merx.com ***

The RFP invites offers for the provision of the following equipment:A Plasma Enhanced Chemical Vapor Deposition (PECVD) system for depositing silicon-based materials.An Inductively Coupled Plasma Reactive Ion Etcher (ICP-RIE) for metal etching.
The proponent must be able to supply both items.

THE DELIVERABLES

4D LABS at Simon Fraser University is acquiring infrastructure to enable further development of quantum- and microsystems-based technologies. In particular, they are seeking the following:
PECVD (Plasma-Enhanced Chemical Vapor Deposition) system for deposition of silicon-based materials.ICP-RIE (Inductively Coupled Plasma Reactive Ion Etching) system for etching of metals.
The tools will be housed in a class 100 Clean Room facility, alongside a variety of micro- and nanofabrication equipment.

Key requirements for the systems:Designed for low-to-medium scale research and development.Flexible systems to allow for a wide range of materials to be used.Suitable for a multi-user facility with low service requirements.Simple to operate.
Please include the following instrument requirements in the proposal:Floor loading.Electrical power supply (e.g., 208V or 120V).Cooling (including pressure, flow, and heat load).Exhaust.Gases.

PECVD/ ICP-RIE Requirements:

Mandatory Specifications for PECVD and ICP-RIE

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Documents:

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Plasma Enhanced Chemical Vapour Deposition (Pecvd) System and An… - Canada Tender

The SIMON FRASER UNIVERSITY, a Government sector organization in Canada, has announced a new tender for Plasma Enhanced Chemical Vapour Deposition (Pecvd) System and An…. This tender is published on CanadaTenders under CAT Ref No: 108693829 and is categorized as a Tender. Interested and eligible suppliers are invited to participate by reviewing the tender documents and submitting their bids before the deadline on 2024-11-08.

The estimated tender value is Refer Document, and full details, including technical specifications and submission requirements, are provided in the official tender documents. Ensure all submissions meet the criteria outlined to be considered for evaluation.